Today's plasma etch chemistries : Peter H. Singer. Semiconductor int., 68 (March 1988)

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 125 KB
• Volume: 29
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(89)90432-0