✦ LIBER ✦
Titanium silicide/silicon nonohmic contact resistance for NFET's, PFET's, diffused resistors, and NPN's in a BiCMOS technology
✍ Scribed by Hook, T.B.; Mann, R.W.; Nowak, E.J.
- Book ID
- 114536065
- Publisher
- IEEE
- Year
- 1995
- Tongue
- English
- Weight
- 694 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0018-9383
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