✦ LIBER ✦
Titanium nitride films for barrier applications produced by rapid thermal CVD and subsequent in-situ annealing
✍ Scribed by R. Leutenecker; B. Fröschle; U. Cao-Minh; P. Ramm
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 617 KB
- Volume
- 270
- Category
- Article
- ISSN
- 0040-6090
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