Titanium aluminum nitride films: A new alternative to TiN coatings

✍ Scribed by Münz, Wolf-Dieter

• Book ID: 127105400
• Publisher: AVS (American Vacuum Society)
• Year: 1986
• Tongue: English
• Weight: 836 KB
• Volume: 4
• Category: Article
• ISSN: 0734-2101
• DOI: 10.1116/1.573713