✦ LIBER ✦
TiN formed by evaporation as a diffusion barrier between Al and Si: C Y Ting, J Vac Sci Technol, 21 (1), 1982, 14–18
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 180 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0042-207X
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