TiN films created in close vicinity of transition from α-Ti(N) to δ-TiNx phase

✍ Scribed by V. Poulek; J. Musil; V. Valvoda; L. Dobiasova

• Book ID: 103951516
• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 682 KB
• Volume: 140
• Category: Article
• ISSN: 0921-5093
• DOI: 10.1016/0921-5093(91)90492-6