Time resolved spectroscopy of the emission of fluorescent light upon UV laser assisted CVD of W from WF6

✍ Scribed by P. Heszler; P. Mogyorósi; J.O. Carlsson

• Book ID: 103616887
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 339 KB
• Volume: 69
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(93)90537-l