✦ LIBER ✦
Time-resolved measurements of ion energy distributions in dual-mode pulsed-microwave/radio frequency plasma
✍ Scribed by O. Zabeida; A. Hallil; M. R. Wertheimer; L. Martinu
- Book ID
- 125888384
- Publisher
- American Institute of Physics
- Year
- 2000
- Tongue
- English
- Weight
- 677 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0021-8979
- DOI
- 10.1063/1.373714
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