Dynamics of excimer laser ablation of po
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D. L. Singleton; G. Paraskevopoulos; R. S. Taylor
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Article
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1990
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Springer
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English
โ 442 KB
The time-dependent intensity profile of pulsed KrF excimer laser radiation reflected from polyimide is determined over a range of laser fluences, from well below to above the ablation threshold. The reflected laser beam is truncated once the incident laser radiation exceeds a threshold fluence, i.e.