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Time-dependent simulation modelling of reactivesputtering

✍ Scribed by Eiji Kusano; Denis M. Goulart

Book ID: 114085787
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 376 KB
Volume: 193-194
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(05)80015-x

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