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Time-Dependent Relaxation of Strained Silicon-on-Insulator Lines Using a Partially Coherent X-Ray Nanobeam

✍ Scribed by Mastropietro, F.; Eymery, J.; Carbone, G.; Baudot, S.; Andrieu, F.; Favre-Nicolin, V.


Book ID
121478243
Publisher
The American Physical Society
Year
2013
Tongue
English
Weight
928 KB
Volume
111
Category
Article
ISSN
0031-9007

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