✦ LIBER ✦
Time-dependent dielectric breakbown evaluation for rapid-thermally grown SiO2 films formed on submicron-grooved Si surfaces
✍ Scribed by T. Arakawa; H. Fukuda; Y. Okabe; S. Ohno
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 541 KB
- Volume
- 103
- Category
- Article
- ISSN
- 0022-0248
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