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Tilted-wing-induced stress distribution in epitaxial lateral overgrown GaN

✍ Scribed by W. M. Chen; P. J. McNally; J. Kanatharana; D. Lowney; K. Jacobs; T. Tuomi; L. Knuuttila; J. Riikonen; J. Toivonen


Book ID
111537676
Publisher
Springer US
Year
2003
Tongue
English
Weight
252 KB
Volume
14
Category
Article
ISSN
0957-4522

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## Abstract The crystalline quality in epitaxially laterally overgrown (ELO) GaN and the amount of wing tilt is characterized on a local basis, with high spatial and angular resolution. A method of full‐field X‐ray microdiffraction imaging, termed rocking curve imaging, is used to record simultaneo