✦ LIBER ✦
Tight-binding quantum chemical molecular dynamics simulation of mechano-chemical reactions during chemical–mechanical polishing process of SiO2 surface by CeO2 particle
✍ Scribed by Arivazhagan Rajendran; Yasufumi Takahashi; Michihisa Koyama; Momoji Kubo; Akira Miyamoto
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 275 KB
- Volume
- 244
- Category
- Article
- ISSN
- 0169-4332
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