✦ LIBER ✦
Ti-silicide with improved thermal stability using silicidation through oxide on amorphous silicon substrates
✍ Scribed by Y. S. Hwang; S. H. Paek; S. G. Kang; H. C. Cho; J. S. Choi; S. I. Lee; J. K. Lee
- Publisher
- Springer
- Year
- 1993
- Tongue
- English
- Weight
- 715 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0261-8028
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