✦ LIBER ✦
Three-dimensional transport phenomena in chemical vapor deposition equipment: A comparison of theoretical predictions with measurements and some concepts regarding equipment design
✍ Scribed by O. J. Ilegbusi; J. Szekely
- Book ID
- 112814297
- Publisher
- The Minerals, Metals & Materials Society
- Year
- 1990
- Tongue
- English
- Weight
- 648 KB
- Volume
- 21
- Category
- Article
- ISSN
- 1543-1916
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