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Three-dimensional structuring of sapphire by sequential He+ion-beam implantation and wet chemical etching

✍ Scribed by A. Crunteanu; G. Jänchen; P. Hoffmann; M. Pollnau; C. Buchal; A. Petraru; R.W. Eason; D.P. Shepherd


Book ID
106018771
Publisher
Springer
Year
2003
Tongue
English
Weight
552 KB
Volume
76
Category
Article
ISSN
1432-0630

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