Three-dimensional morphology evolution of SiO[sub 2] patterned films under MeV ion irradiation

✍ Scribed by Otani, Kan; Chen, Xi; Hutchinson, John W.; Chervinsky, John F.; Aziz, Michael J.

• Book ID: 119945955
• Publisher: American Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 595 KB
• Volume: 100
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.2215269