Three-dimensional measurements of UV-imprint process by micro-digital holographic-PTV

✍ Scribed by Satake, Shin-ichi; Taniguchi, Jun; Kanai, Takahiro; Unno, Noriyuki

• Book ID: 120336431
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 921 KB
• Volume: 97
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2012.04.010