Synchrotron-radiation computed laminogra
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Helfen, Lukas ;Myagotin, Anton ;Rack, Alexander ;Pernot, Petra ;Mikulík, Petr ;D
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Article
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2007
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John Wiley and Sons
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English
⚖ 292 KB
## Abstract Synchrotron‐radiation computed laminography (SRCL) is developed as a method for high‐resolution three‐dimensional (3D) imaging of regions of interest (ROIs) in all kinds of laterally extended devices. One of the application targets is the 3D X‐ray inspection of microsystems. In comparis