Three-dimensional holographic lithography by an iterative algorithm

✍ Scribed by Cowling, Joshua J.; Williams, Gavin L.; Purvis, Alan; McWilliam, Richard; Toriz-Garcia, Jose J.; Seed, Nicholas L.; Soulard, Florian B.; Ivey, Peter A.

• Book ID: 115434917
• Publisher: Optical Society of America
• Year: 2011
• Tongue: English
• Weight: 780 KB
• Volume: 36
• Category: Article
• ISSN: 0146-9592
• DOI: 10.1364/OL.36.002495