Three-dimensional damage distributions of molecular ions implanted into silicon, as recorded by RBS/channeling combined with tomography

✍ Scribed by M. Müller, D. Fink

• Book ID: 120783118
• Publisher: Springer
• Year: 1995
• Tongue: English
• Weight: 664 KB
• Volume: 61
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/BF01538382