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Three-Dimensional Chemical Characterization of Electronic Materials || Transient Phenomena and Impurity Relocation in SIMS Depth Profiling using Oxygen Bombardment: Pursuing the Physics to Interpret the Data [and Discussion]

✍ Scribed by K. Wittmaack and I. W. Drummond


Book ID
123646129
Publisher
The Royal Society
Year
1996
Tongue
English
Weight
925 KB
Volume
354
Category
Article
ISSN
0264-3952

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