✦ LIBER ✦
Three-beam interference lithography: upgrading a Lloyd's interferometer for single-exposure hexagonal patterning
✍ Scribed by de Boor, Johannes; Geyer, Nadine; Gösele, Ulrich; Schmidt, Volker
- Book ID
- 115431947
- Publisher
- Optical Society of America
- Year
- 2009
- Tongue
- English
- Weight
- 363 KB
- Volume
- 34
- Category
- Article
- ISSN
- 0146-9592
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