Thorough study of the local structure of LiPON thin films to better understand the influence of a solder-reflow type thermal treatment on their performances

✍ Scribed by B. Fleutot; B. Pecquenard; H. Martinez; A. Levasseur

• Book ID: 113917215
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 694 KB
• Volume: 206
• Category: Article
• ISSN: 0167-2738
• DOI: 10.1016/j.ssi.2011.11.009