Thomson scattering for determining electron concentrations and temperatures in an inductively coupled plasma-I. Assessment of the technique for a low—flow, low—power plasma

✍ Scribed by Marshall, K.A.; Hieftje, G.M.

• Book ID: 121484639
• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 741 KB
• Volume: 43
• Category: Article
• ISSN: 0584-8547
• DOI: 10.1016/0584-8547(88)80117-4