Thin TiN and TiB2 coatings with low residual stress deposited at different temperatures by cathodic arc ion plating

✍ Scribed by Anthony J. Perry; Albert F. Tian; James R. Treglio; Chris Loomis

• Book ID: 107930415
• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 625 KB
• Volume: 68-69
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(94)90212-7