✦ LIBER ✦
Thin Polymer Films with High Step Coverage in Microtrenches by Initiated CVD
✍ Scribed by Salmaan H. Baxamusa; Karen K. Gleason
- Publisher
- John Wiley and Sons
- Year
- 2008
- Tongue
- English
- Weight
- 228 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0948-1907
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