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Thin layers obtained by plasma jet deposition at low pressure: Characterization of the layers, growth velocity and comparison with other methods

✍ Scribed by J. Guilly; M. Pennaneach


Book ID
107925803
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
257 KB
Volume
36
Category
Article
ISSN
0169-4332

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