✍ Scribed by C.E. Morosanu and G. Siddall (Auth.)
No coin nor oath required. For personal study only.
The explosive growth in the semiconductor industry has caused a rapid evolution of thin film materials that lend themselves to the fabrication of state-of-the-art semiconductor devices. Early in the 1960s an old research technique named chemical vapour phase deposition (CVD), which has several unique advantages, developed into the most widely used technique for thin film preparation in electronics technology. In the last 25 years, tremendous advances have been made in the science and technology of thin films prepared by means of CVD. This book presents in a single volume, an up-to-date overview of the important field of CVD processes which has never been completely reviewed previously. Contents: Part I. 1. Evolution of CVD Films. Introductory remarks. Short history of CVD thin films. II. Fundamentals. 2. Techniques of Preparing Thin Films. Electrolytic deposition techniques. Vacuum deposition techniques. Plasma deposition techniques. Liquid-phase deposition techniques. Solid-phase deposition techniques. Chemical vapour conversion of substrate. Chemical vapour deposition. Comparison between CVD and other thin film deposition techniques. 3. Chemical Processes Used in CVD
Content:
THIN FILMS SCIENCE AND TECHNOLOGY, Page 2
Front Matter, Page 3
Copyright, Page 4
Preface, Page 5
Acknowledgements, Page 7
1 - Evolution of CVD Films, Pages 19-27
2 - Techniques of Preparing Thin Films, Pages 31-59
3 - Chemical Processes Used in CVD, Pages 60-90
4 - Thermodynamics of CVD, Pages 91-100
5 - Kinetics of CVD, Pages 101-140
6 - Measurement of Thin Film Thickness, Pages 141-162
7 - Nucleation and Growth of CVD Films, Pages 163-176
8 - Thin Film Structure, Pages 177-200
9 - Analysis of CVD Films, Pages 201-222
10 - Properties of CVD Films, Pages 223-341
11 - Equipment and Substrates, Pages 345-372
12 - Preparation and Properties of Semiconducting Thin Films, Pages 373-421
13 - Preparation and Properties of Amorphous Insulating Thin Films, Pages 422-437
14 - Preparation and Properties of Conductive Thin Films, Pages 438-455
15 - Preparation and Properties of Superconducting and Magnetic Thin Films, Pages 456-462
16 - Uses of CVD Thin Films, Pages 465-515
17 - Present and Future Importance of CVD Films, Pages 519-523
References, Pages 525-681
Index of Acronyms and Abbreviations, Pages 682-684
Author Index, Pages 684-704
CVD Film Index, Pages 704-709
Subject Index, Pages 709-716
Supplier Index, Pages 717-718
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