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Thin-film transistors in polycrystalline silicon by blanket and local source/drain hydrogen plasma-seeded crystallization

✍ Scribed by Pangal, K.; Sturm, J.C.; Wagner, S.; Yao, N.


Book ID
114538254
Publisher
IEEE
Year
2000
Tongue
English
Weight
304 KB
Volume
47
Category
Article
ISSN
0018-9383

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