✦ LIBER ✦
Thin film technology for advanced semiconductors—Part I. Silicon epitaxy: a critical technology : K. E. Bean, W. R. Runyan and R. G. Massey. Semiconductor Int. 136 (May 1985)
- Book ID
- 103280700
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 123 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0026-2714
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