Thin film structures with a gap width comparable to the film thickness fabricated by sputter etching : T. Ricker and C. Schwing. Solid St. Technol. 69 (1974)

• Book ID: 103273812
• Publisher: Elsevier Science
• Year: 1975
• Tongue: English
• Weight: 132 KB
• Volume: 14
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(75)90686-1