THIN-FILM GAGE MARKERS FOR LASER-BASED STRAIN MEASUREMENT ON MEMS MATERIALS

✍ Scribed by J.C. Fox; R.L. Edwards; W.N. Sharpe Jr.

• Book ID: 111371375
• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 541 KB
• Volume: 23
• Category: Article
• ISSN: 0732-8818
• DOI: 10.1111/j.1747-1567.1999.tb01567.x