๐”– Bobbio Scriptorium
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Thin film chip resistors with high resistance and low temperature coefficient of resistance

โœ Scribed by Xiuyu Wang; Zhisheng Zhang; Tian Bai; Zhonge Liu

Book ID
107626746
Publisher
Tianjin University
Year
2010
Tongue
Chinese
Weight
297 KB
Volume
16
Category
Article
ISSN
1006-4982

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โœ X.Y. Wang; Z.S. Zhang; T. Bai ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science โš– 504 KB

The sputtering target for high-resistance thin film resistors plays a decisive role in temperature coefficient of resistance (TCR). Silicon-rich chromium (Cr)-silicon (Si) target was designed and smelted for high-resistance thin film resistors with low TCR. Valve metal tantalum (Ta) and aluminum (Al