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Thickness uniformity on rotating substrates: K. H. Behrndt, Trans. 10 Nat. Vac. Symp., New York, 1963, 379–384

Publisher: Elsevier Science
Year: 1964
Tongue: English
Weight: 100 KB
Volume: 14
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(64)90561-5

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📂 Article 📅 1965 🏛 Elsevier Science 🌐 English ⚖ 268 KB