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Thickness scan of metallic layer by photon induced X-ray emission

✍ Scribed by A. Kozela; A. Białek; K. Bodek; P. Gorel; St. Kistryn; E. Stephan; J. Zejma


Book ID
108225871
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
512 KB
Volume
269
Category
Article
ISSN
0168-583X

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## Abstract The crystallographic structures of the various Metalorganic Vapour Phase Epitaxy (MOVPE) thin GaN epitaxial layers deposited on (00.1) sapphire substrates are described and compared with the structural properties of the thick gallium nitride layers deposited by Hydride Vapour Phase Epit