✦ LIBER ✦
Thickness of surface thin oxide layers determined by impedance spectroscopy using silicon/oxide/electrolyte (SOE) structures
✍ Scribed by M Chemla; V Bertagna; R Erre; F Rouelle; S Petitdidier; D Levy
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 201 KB
- Volume
- 227
- Category
- Article
- ISSN
- 0169-4332
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