Thickness of ion implanted layers as determined by elastic recoil detection analysis and spectroscopic ellipsometry

✍ Scribed by S. Mändl; J.W. Gerlach; W. Assmann; B. Rauschenbach

• Book ID: 114167149
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 244 KB
• Volume: 206
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(03)00817-6