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Thickness estimation of silicon-on-lnsulator by means of the fourier transform of bilinearly transformed infrared reflectance data

โœ Scribed by Pieter L. Swart; Beatrys M. Lacquet


Book ID
112811934
Publisher
Springer US
Year
1990
Tongue
English
Weight
487 KB
Volume
19
Category
Article
ISSN
0361-5235

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