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Thickness distribution of carbon nitride films grown by inverse-pulsed laser deposition

✍ Scribed by L. Égerházi; Zs. Geretovszky; T. Szörényi

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 234 KB
Volume: 247
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2005.01.041

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