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Thickness-dependent electrical characteristics of lead zirconate titanate thin films

โœ Scribed by Udayakumar, K. R.; Schuele, P. J.; Chen, J.; Krupanidhi, S. B.; Cross, L. E.


Book ID
120303838
Publisher
American Institute of Physics
Year
1995
Tongue
English
Weight
955 KB
Volume
77
Category
Article
ISSN
0021-8979

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Characteristics of nano-thickness lead z
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We successfully fabricated lead zirconate titanate (PZT) films with film thickness of 70 nm using a modified solution combined with lead titanate (PTO) seed layer. Throughout various approaches, we have found that the microstructure of PZT film plays an important role in determining the hysteretic p