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Thickness Dependence of Electrical and Structural Properties of FTO Films

โœ Scribed by F. M. Amanullah; K. J. Pratap; Prof. V. Hari Babu


Publisher
John Wiley and Sons
Year
1991
Tongue
English
Weight
292 KB
Volume
26
Category
Article
ISSN
0232-1300

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Influence of substrate and film thicknes
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## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of