✦ LIBER ✦
Thickness dependence of dielectric breakdown failure of thermal SiO2 films : Kikuo Yamabe, Kenji Taniguchi and Yoshiaki Matsushita. IEEE 21 st Ann. Proc. Reliab. Phys. 184 (1983)
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 132 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0026-2714
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