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Thick monocrystalline silicon on oxidized silicon wafers produced by a zone melting process using a scanning halogen lamp

✍ Scribed by Tillack, B. ;Möck, P. ;Banisch, R. ;Reinboth, R. ;Richter, H. H. ;Voelskow, M. ;Matthái, J. ;Wiesek, E.


Publisher
John Wiley and Sons
Year
1986
Tongue
English
Weight
500 KB
Volume
94
Category
Article
ISSN
0031-8965

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