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Thermo‐oxidative erosion of amorphous hydrogenated carbon films

✍ Scribed by Haasz, A. A.; Chiu, S.; Pierre, J. E.; Gudimenko, Y. I.

Book ID: 115486407
Publisher: AVS (American Vacuum Society)
Year: 1996
Tongue: English
Weight: 415 KB
Volume: 14
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.579916

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