✦ LIBER ✦
Thermoelastic effects in x-ray lithography masks during synchrotron storage ring irradiation
✍ Scribed by Y. Vladimirsky; J.R. Maldonado; O. Vladimirsky; F. Cerrina; M. Hansen; R. Nachman; G.M. Wells
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 654 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0167-9317
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