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Thermoelastic coupled modeling for a thermal bimorph actuator

โœ Scribed by Liang-Chieh Wu; Kow-Ming Chang


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
185 KB
Volume
34
Category
Article
ISSN
0093-6413

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โœ Benjamin A. Griffin; Venkataraman Chandrasekaran; Matthew D. Williams; Bhavani V ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 605 KB

This paper presents a reduced analytical modeling method for the initial optimal design of thermoelastic micromachined actuators. The key aspects of the model are a Green's function formulation of the axisymmetric heat conduction equation that incorporates an internal heat source and the solution of