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Thermodynamics of the Production of Condensed Phases in the CVD of Methyltrichlorosilane Pyrolysis

✍ Scribed by Juanli Deng; Kehe Su; Qingfeng Zeng; Xin Wang; Laifei Cheng; Yongdong Xu; Litong Zhang

No coin nor oath required. For personal study only.

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