Thermodynamics of the production of condensed phases in the chemical vapor deposition process of zirconium diboride with ZrCl4–BCl3–H2 precursors

✍ Scribed by Juanli Deng; Laifei Cheng; Zhiliang Hong; Kehe Su; Litong Zhang

• Book ID: 113937311
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 964 KB
• Volume: 520
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2011.10.004